JPS61123531U - - Google Patents
Info
- Publication number
- JPS61123531U JPS61123531U JP603785U JP603785U JPS61123531U JP S61123531 U JPS61123531 U JP S61123531U JP 603785 U JP603785 U JP 603785U JP 603785 U JP603785 U JP 603785U JP S61123531 U JPS61123531 U JP S61123531U
- Authority
- JP
- Japan
- Prior art keywords
- hard
- hard plate
- stand
- semiconductor wafer
- disposed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP603785U JPS61123531U (en]) | 1985-01-19 | 1985-01-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP603785U JPS61123531U (en]) | 1985-01-19 | 1985-01-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61123531U true JPS61123531U (en]) | 1986-08-04 |
Family
ID=30483106
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP603785U Pending JPS61123531U (en]) | 1985-01-19 | 1985-01-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61123531U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02301137A (ja) * | 1989-05-15 | 1990-12-13 | Toshiba Mach Co Ltd | ポリシング装置 |
-
1985
- 1985-01-19 JP JP603785U patent/JPS61123531U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02301137A (ja) * | 1989-05-15 | 1990-12-13 | Toshiba Mach Co Ltd | ポリシング装置 |